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Influence of electron landing energy on the measurement of the dimensional properties of nanoparticle populations imaged by SEM
Ultramicroscopy ( IF 2.2 ) Pub Date : 2021-05-04 , DOI: 10.1016/j.ultramic.2021.113300
Loïc Crouzier , Alexandra Delvallée , Laurent Devoille , Sébastien Artous , François Saint-Antonin , Nicolas Feltin

Scanning Electron Microscopy (SEM) technique is widely used to characterize nanoparticle (NP) size. The landing energy (LE) of the primary electron beam is considered to be a key parameter related to the ability of electrons to penetrate the sample. However, few studies have been carried out so far on the influence of this parameter on the measurement of NP size by SEM. The increasing needs for reference materials consisting of size-controlled NP suspension for microscope calibration induce new issues. This paper focuses on the effect of electron landing energy on the measurement of the equivalent diameter of several NP populations by SEM. To evaluate the influence of LE, particles of different sizes and chemical compositions were analyzed. The results showed the variation of the measured diameter as a function of LE. SEM secondary electron (SE) yield modeling by the Monte Carlo method allowed us to relate this variation to the information volume in the material. Finally, the use of reference particles and transmission electron microscopy (TEM) allowed us to determine an optimal value of LE to be applied, depending on the chemical composition and particle size to limit the bias in the SEM measurement. We showed that this operating point can be simply determined without reference nanomaterials by scanning an LE range.



中文翻译:

电子着陆能对SEM成像的纳米粒子群尺寸特性测量的影响

扫描电子显微镜(SEM)技术被广泛用于表征纳米颗粒(NP)的尺寸。一次电子束的着陆能(LE)被认为是与电子穿透样品的能力有关的关键参数。但是,到目前为止,关于此参数对通过SEM测量NP尺寸的影响的研究很少。对用于显微镜校准的,由尺寸控制的NP悬浮液组成的参考材料的需求不断增加,引发了新的问题。本文着重研究电子着陆能对通过SEM测量几个NP种群等效直径的影响。为了评估LE的影响,分析了不同大小和化学成分的颗粒。结果表明,测得的直径随LE的变化而变化。通过蒙特卡洛方法进行的SEM二次电子(SE)产率建模使我们能够将这种变化与材料中的信息量相关联。最后,参考粒子和透射电子显微镜(TEM)的使用使我们能够确定要应用的LE的最佳值,具体取决于化学成分和粒度以限制SEM测量中的偏差。我们表明,通过扫描LE范围,无需参考纳米材料即可轻松确定该工作点。取决于化学成分和粒径,以限制SEM测量中的偏差。我们表明,通过扫描LE范围,无需参考纳米材料即可轻松确定该工作点。取决于化学成分和粒径,以限制SEM测量中的偏差。我们表明,通过扫描LE范围,无需参考纳米材料即可轻松确定该工作点。

更新日期:2021-05-11
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