Precision Engineering ( IF 3.6 ) Pub Date : 2021-05-04 , DOI: 10.1016/j.precisioneng.2021.04.019 Chengyuan Yao , Shuchun Huo , Wanfu Shen , Zhaoyang Sun , Xiaodong Hu , Xiaotang Hu , Chunguang Hu
Polishing is a main process in achieving high-quality surfaces of optical components. However, effective assessing technique for rough stage in the polishing process is sparse so that hinders the study on the mechanism and optimization of polishing. In this study, we propose an inspection method for polishing quality based on quasi Brewster angle technology (qBAT). An equivalent medium layer theory and its model are developed to accurately describe the optical reflection characteristics of a rough surface. Hence both rough- and fine-polishing qualities can be evaluated by the qBAT approach. To demonstrate the newly proposed method, laser crystal, gadolinium gallium garnets, is studied by computational simulation and experiments. A high consistence is achieved between theoretical simulation and experimental results, which proves the robustness of the method to the rough surfaces. To our knowledge, it is the first time that the qBAT is developed to evaluate the polishing quality covering rough- and fine-polishing stages. This capability shows great potential in fundamental research and process optimization of polishing brittle-hard materials.
中文翻译:
使用准布鲁斯特角技术评估抛光的脆性光学晶体的质量
抛光是获得光学组件高质量表面的主要过程。然而,抛光过程中粗糙阶段的有效评估技术稀疏,阻碍了对抛光机理和优化方法的研究。在这项研究中,我们提出了一种基于准布鲁斯特角技术(qBAT)的抛光质量检验方法。发展了等效介质层理论及其模型,以准确描述粗糙表面的光反射特性。因此,可以通过qBAT方法评估粗抛光质量和细抛光质量。为了演示新提出的方法,通过计算仿真和实验研究了激光晶体,镓石榴石。在理论模拟和实验结果之间实现了高度一致性,证明了该方法对粗糙表面的鲁棒性。据我们所知,这是第一次开发qBAT来评估涵盖粗抛光和精抛光阶段的抛光质量。此功能在抛光脆性硬质材料的基础研究和工艺优化中显示出巨大的潜力。