The use of electron mirrors in aberration correction and surface-sensitive microscopy techniques such as low-energy electron microscopy has been established. However, in this work, by implementing an easy to construct, fully electrostatic electron mirror system under a sample in a conventional scanning electron microscope (SEM), we present a new imaging scheme which allows us to form scanned images of the top and bottom surfaces of the sample simultaneously. We believe that this imaging scheme could be of great value to the field of in-situ SEM which has been limited to observation of dynamic changes such as crack propagation and other surface phenomena on one side of samples at a time. We analyze the image properties when using a flat versus a concave electron mirror system and discuss two different regimes of operation. In addition to in-situ SEM, we foresee that our imaging scheme could open up avenues towards spherical aberration correction by the use of electron mirrors in SEMs without the need for complex beam separators.

已经建立了在像差校正和表面敏感显微镜技术（例如低能电子显微镜）中使用电子镜的方法。但是，在这项工作中，通过在常规扫描电子显微镜（SEM）的样品下实施易于构造的全静电电子镜系统，我们提出了一种新的成像方案，该方案使我们能够形成顶部和底部表面的扫描图像同时采样。我们认为，这种成像方案对于原位SEM领域可能具有巨大的价值，原位SEM限于一次观察样品一侧的动态变化，例如裂纹扩展和其他表面现象。我们分析了使用平面电子镜和凹面电子镜系统时的图像特性，并讨论了两种不同的操作方式。