A single quadrupole mass spectrometer coupled measuring setup was developed for the investigation of the helium transmission rate (HeTR) of SiO_x-coated polyethylene terephthalate (PET) barrier films. The setup allows the pressure-less and time-resolved measurements of the helium permeation at transient and steady-state conditions. Whereas standard water vapour transmission rate (WVTR) experiments took extended test times (in the range of several days), HeTR measurements were finished after 1 h. For the material system investigated here, an excellent linear correlation of WVTR and HeTR was proven over two orders of magnitude (regarding WVTR). Experiments with application of different strain loads on the coated films revealed a significant increase of both, HeTR and WVTR. Scanning electron microscope (SEM) measurements evidenced multiple ruptures of the SiO_x coating depending on the applied strain and initial thickness of the SiO_x layer. Considering virgin barrier films and strain-ruptured barrier films, a good correlation of WVTR and HeTR was shown.

中文翻译：

---

氦气透过率是一种快速可靠的评估透明 PET-SiOx 阻隔膜水蒸气透过率的方法

开发了一种单四极杆质谱仪耦合测量装置，用于研究 SiO _x的氦透射率 (HeTR)-涂层聚对苯二甲酸乙二醇酯 (PET) 阻隔膜。该设置允许在瞬态和稳态条件下对氦渗透进行无压力和时间分辨测量。标准水蒸气透过率 (WVTR) 实验需要延长测试时间（几天范围内），而 HeTR 测量在 1 小时后完成。对于此处研究的材料系统，WVTR 和 HeTR 的出色线性相关性已被证明超过两个数量级（关于 WVTR）。对涂层薄膜施加不同应变载荷的实验表明，HeTR 和 WVTR 均显着增加。扫描电子显微镜 (SEM) 测量表明 SiO _x涂层的多次破裂取决于所施加的应变和 SiO _{x 的}初始厚度层。考虑到原始屏障膜和应变破裂屏障膜，显示了 WVTR 和 HeTR 的良好相关性。