Calorimetry of single biological entities remains elusive. Suspended microchannel resonators (SMRs) offer excellent performance for real-time detection of various analytes and could hold the key to unlocking pico-calorimetry experiments. However, the typical readout techniques for SMRs are optical-based, and significant heat is dissipated in the sensor, altering the measurement and worsening the frequency noise. In this manuscript, we demonstrate for the first time full on-chip piezoelectric transduction of SMRs on which we focus a laser Doppler vibrometer to analyze its effect. We demonstrate that suddenly applying the laser to a water-filled SMR causes a resonance frequency shift, which we attribute to a local increase in temperature. When the procedure is repeated at increasing flow rates, the resonance frequency shift diminishes, indicating that convection plays an important role in cooling down the device and dissipating the heat induced by the laser. We also show that the frequency stability of the device is degraded by the laser source. In comparison to an optical readout scheme, a low-dissipative transduction method such as piezoelectricity shows greater potential to capture the thermal properties of single entities.

单个生物实体的量热法仍然难以捉摸。悬浮微通道谐振器 (SMR) 为各种分析物的实时检测提供了出色的性能，并且可以成为解锁微微量热法实验的关键。然而，SMR 的典型读出技术是基于光学的，传感器会散发大量热量，从而改变测量结果并使频率噪声恶化。在这份手稿中，我们首次展示了 SMR 的全片上压电转换，我们将激光多普勒测振仪聚焦在该转换上以分析其影响。我们证明，突然将激光应用于充满水的 SMR 会导致共振频移，我们将其归因于局部温度升高。当以增加的流速重复该过程时，共振频移减小，表明对流在冷却器件和消散激光引起的热量方面起着重要作用。我们还表明，激光源会降低设备的频率稳定性。与光学读出方案相比，压电等低耗散换能方法在捕捉单个实体的热特性方面显示出更大的潜力。