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1D Model of the Dielectric Barrier Discharge in Ar–S 2 Mixtures
Plasma Chemistry and Plasma Processing ( IF 3.6 ) Pub Date : 2021-04-24 , DOI: 10.1007/s11090-021-10175-6
S. Avtaeva

A one-dimensional fluid model of a dielectric-barrier discharge (DBD) in Ar–S2 mixtures is developed, and the properties of the discharge are modeled. The discharge in a 3-mm-long gas gap between 2-mm-thick quartz layers covering metal electrodes is considered. The DBD spatiotemporal characteristics are simulated at gas pressures of 300 Torr for the case in which a 20-kHz harmonic voltage with amplitude of 8 kV is applied to electrodes. It was shown that the discharge active phase at S2 fraction of 0.1% in Ar–S2 mixture is characterized by the presence of multiple current spikes, which is explained by weak ionization waves. The cycle-averaged dissociation degree of S2 molecules is ~ 0.05–0.3% in Ar–S2 mixture with S2 fraction of 0.1–1% and degree of gas ionization is 2 × 10–8–4 × 10–7. The plasma is electronegative due to the fast attachment of electrons to sulfur molecules: e + S2 → S2. The radiative efficiency of S2* excited molecules at S2 fraction of 0.5 and 1% is about two times higher than at S2 fraction of 0.1% and reaches about 0.8%. At S2 content in Ar–S2 mixture of 0.1% the main contribution in the discharge emission make argon resonance atoms (70%), while at 1%S2 the main contribution in the emission make sulfur excited atoms (95%), which radiative efficiency abruptly increases. The optimal S2 fraction in Ar–S2 mixture for developing DBD radiation source based on emission of S2* molecules is about 0.5%, when the 98% of discharge emission distributes between Ar* (44%), S2* (42%) and Ar2* (12%).



中文翻译:

Ar–S 2混合物中介电势垒放电的一维模型

建立了Ar–S 2混合物中介电势垒放电(DBD)的一维流体模型,并对放电特性进行了建模。考虑在覆盖金属电极的2毫米厚石英层之间的3毫米长气隙中放电。对于在电极上施加振幅为8 kV的20 kHz谐波电压的情况下,在气压为300 Torr的情况下,模拟了DBD时空特性。结果表明,在Ar–S 2混合物中,S 2含量为0.1%时的放电活性相的特征在于存在多个电流尖峰,这可以用弱电离波来解释。在Ar–S 2中,S 2分子的循环平均解离度为〜0.05–0.3%S 2分数为0.1–1%且气体电离度为2×10 –8 –4×10 –7的混合气。由于电子与硫分子的快速附着,等离子体具有负电性:e  + S 2  →S 2 。S 2分数为0.5和1%时,S 2 *激发分子的辐射效率大约是S 2分数为0.1%时的辐射效率的两倍,并达到约0.8%。在Ar–S 2混合物中的S 2含量为0.1%时,放电发射的主要成分是氩气共振原子(70%),而在1%的S 2中发射的主要贡献是使硫激发的原子(95%)急剧增加。当98%的放电发射分布在Ar *(44%),S 2 *(42 )之间时,基于S 2 *分子的发射,用于开发DBD辐射源的Ar–S 2混合物中的最佳S 2分数约为0.5%。%)和Ar 2 *(12%)。

更新日期:2021-04-26
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