This paper aims at designing a differential pressure sensor. The objective of the work is to design and fabricate the electrodes of a capacitive pressure sensor, so as to measure absolute and differential pressure accurately with improved sensitivity. In place of conventional parallel plate diaphragm, S-type electrodes are proposed in the present work. The work comprises of study of the proposed design in terms of a mathematical model, input-output behavior along with detailed analysis of pressure distribution pattern. Output capacitance obtained for changes in pressure is converted to voltage with the suitable signal conditioning circuit and data acquisition system to acquire the signal on to a PC. A neural network model is designed to compensate the nonlinearities present in the sensor output. Input-output characteristics of the designed sensor shows an improved response as compared with existing pressure sensors.

本文旨在设计一种压差传感器。该工作的目的是设计和制造电容式压力传感器的电极，从而以提高的灵敏度准确地测量绝对压力和压差。在当前的工作中，提出了代替传统的平行板隔膜的S型电极。这项工作包括根据数学模型，输入输出行为以及对压力分布模式的详细分析研究拟议的设计。通过适当的信号调节电路和数据采集系统，将因压力变化而获得的输出电容转换为电压，以将信号采集到PC上。设计了一个神经网络模型来补偿传感器输出中存在的非线性。