In this work, a novel on-chip micro pressure sensor was developed for microfluidic pressure monitoring. Polydimethylsiloxane (PDMS) microfluidic chip contained a working fluid channel with a sealed detection channel beneath it. Any change in pressure in the working fluid channel would change the volume of the detection channel. A mixture of two immiscible fluids was sealed in the detection channel. The pressure of the working fluid can be monitored by measuring the interface displacement of the two fluids in the detection channel. A PDMS film between the working channel and detection channel can avoid cross-contamination between fluids. We acquired a calibration curve of the pressure sensor for measurement and optimized the performance of the sensor through parametric studies. Moreover, two pressure sensors were integrated into a microchip to characterize the pressure drop in the microchannel. The developed pressure sensor is inexpensive and easy to be integrated into microfluidic devices to monitor the flow conditions for cell culture, fluid mixing, and droplet manipulation.

在这项工作中，开发了一种用于微流体压力监测的新型片上微压力传感器。聚二甲基硅氧烷 (PDMS) 微流控芯片包含一个工作流体通道，其下方有一个密封的检测通道。工作流体通道中的任何压力变化都会改变检测通道的体积。两种不混溶流体的混合物密封在检测通道中。通过测量检测通道中两种流体的界面位移，可以监测工作流体的压力。工作通道和检测通道之间的 PDMS 薄膜可以避免流体之间的交叉污染。我们获取了用于测量的压力传感器的校准曲线，并通过参数研究优化了传感器的性能。而且，两个压力传感器被集成到一个微芯片中，以表征微通道中的压降。开发的压力传感器价格低廉且易于集成到微流体设备中，以监测细胞培养、流体混合和液滴操作的流动条件。