In this work, implementation of a novelty cathodoluminescence and electron beam induced current image generator system for do in situ experiments in a scanning electron microscopy (SEM) is presented. The equipment is composed by one mechatronic system (MS) with interchangeable probes and digitalization system programed with Labview. Porous silicon and Eu₂(WO₄)₃ microparticles were characterized in cathodoluminescense mode with luminescence peaks centered at 410 and 613 nm, respectively. For CL imaging, the emission signal is collected through a probe of nine optical fibers and transduced to an electrical signal via a photomultiplier tube (PMT). In other way, the configuration in EBIC mode was tested with commercial silicon monocrystalline solar cell to determine internal defects using a current mapping. However for EBIC imaging, the current is collected by two electrodes connected to a picoammeter synchronized with the electron beam. CL and EBIC images are compared with SE images and chemical elemental mapping images to correlate the emission and defects regions of the sample.

在这项工作中，提出了一种新颖的阴极发光和电子束感应电流图像发生器系统，用于在扫描电子显微镜 (SEM) 中进行原位实验。该设备由一个带有可互换探头的机电一体化系统（MS）和使用Labview编程的数字化系统组成。多孔硅和Eu ₂ (WO ₄ ) ₃微粒以阴极发光模式表征，发光峰分别集中在 410 和 613 nm。对于 CL 成像，发射信号通过九根光纤的探针收集，并通过光电倍增管 (PMT) 转换为电信号。换句话说，EBIC 模式下的配置使用商用单晶硅太阳能电池进行测试，以使用电流映射确定内部缺陷。然而，对于 EBIC 成像，电流由连接到与电子束同步的皮安计的两个电极收集。将 CL 和 EBIC 图像与 SE 图像和化学元素映射图像进行比较，以关联样品的发射和缺陷区域。