This paper describes the coaxial integration of a Michelson interferometer (MI) and a Sagnac interferometer (SI) in a high-speed, phase-sensitive laser probe for surface acoustic wave/bulk acoustic wave devices. This combination enables the MI to be used for calibration of the vibration amplitude captured by the SI without sacrificing the measurement accuracy and speed of the SI-based laser probe. First, the system setup is detailed. Next, simultaneous measurement is performed using the SI and MI, and good coincidence is demonstrated between these measured results after correction of tiny misalignment between two optical axes. This means that the calibration can be performed simply by multiplying the data captured by SI by a coefficient of proportionality; this value of this can be determined by comparison with the data captured by simultaneous measurement for a tiny area. Finally, the procedure for absolute vibration amplitude measurement is proposed and its validity is confirmed by actual measurement.

本文介绍了迈克尔逊干涉仪 (MI) 和萨格纳克干涉仪 (SI) 在用于表面声波/体声波器件的高速、相敏激光探头中的同轴集成。这种组合使 MI 能够用于校准由 SI 捕获的振幅，而不会牺牲基于 SI 的激光探头的测量精度和速度。首先，系统设置是详细的。接下来，使用 SI 和 MI 进行同时测量，在校正两个光轴之间的微小错位后，这些测量结果之间表现出良好的一致性。这意味着可以简单地通过将 SI 捕获的数据乘以比例系数来执行校准；这个值可以通过与同时测量一个微小区域的数据进行比较来确定。最后，提出了绝对振幅测量方法，并通过实际测量验证了其有效性。