The enhancement of high-order surface acoustic wave (SAW) harmonics by increasing the metallization ratio was theoretically and experimentally investigated in high-performance bonded dissimilar-material structures. The simulation using a finite element method for 36Y-cut X-propagating LiTaO₃ (36YX-LT)/AT-cut 90X-propagating quartz (AT90X-quartz) and 27YX-LiNbO₃/AT90X-quartz was performed by setting the metallization ratio of the interdigital transducer to a/p=0.8 (a: electrode width, p: pitch), and the LT and LN thin-plate thicknesses to h/λ=0.05 (λ: wavelength) and 0.1, respectively. The fractional bandwidths for 36YX-LT/AT90X-quartz and 27YX-LN/AT90X-quartz were obtained to be 1.6% and 4.0%, respectively, which were larger than those for single LT and LN. For a leaky SAW (LSAW) resonator with a/p=0.8 fabricated on 36YX-LT/AT0X-quartz, the resonance properties and temperature coefficient of frequency of LSAW fundamental waves and harmonics were measured. The measured fractional bandwidth increased from 0.8% to 1.4% for single LT.

通过增加金属化率来增强高阶表面声波 (SAW) 谐波在高性能粘合异种材料结构中进行了理论和实验研究。通过设置金属化率，对 36Y-cut X-传播 LiTaO ₃ (36YX-LT)/AT-cut 90X-传播石英(AT90X-quartz) 和 27YX-LiNbO ₃ /AT90X-quartz使用有限元方法进行模拟叉指式换能器的a/p =0.8（a：电极宽度，p：节距），LT 和 LN 薄板厚度为h / λ =0.05（λ: 波长）和 0.1，分别。获得的 36YX-LT/AT90X-石英和 27YX-LN/AT90X-石英的分数带宽分别为 1.6% 和 4.0%，大于单个 LT 和 LN 的分数带宽。对于在 36YX-LT/AT0X-石英上制造的a / p =0.8的泄漏 SAW (LSAW) 谐振器，测量了 LSAW 基波和谐波的谐振特性和频率温度系数。对于单个 LT，测得的分数带宽从 0.8% 增加到 1.4%。