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A study on the growth enhancement effects of chlorine on carbon nanotube forest in chloride-mediated chemical vapor deposition
Japanese Journal of Applied Physics ( IF 1.5 ) Pub Date : 2021-04-07 , DOI: 10.35848/1347-4065/abf087
Tatsuhiro Hayashi 1 , Motoyuki Karita 1 , Takayuki Nakano 1, 2 , Yoku Inoue 1
Affiliation  

We investigated the growth enhancement effects of chlorine on carbon nanotube (CNT) grown by a chemical vapor deposition method in which FeCl2 is used as a catalyst precursor. Cross-sectional observation of the CNT forest revealed that the FeCl2-originated catalyst showed a liquid-like behavior, and it caused metallic catalyst incorporation into the CNT. When chlorine gas flow was artificially added to the CNT synthesis process, the catalyst was further softened, and it increased the amount of metal filling in CNTs. This softening effect enhanced carbon absorption and diffusion at the catalyst and thus enabled the millimeter-long and high-density forest at a high temperature of 820 C by suppressing the deactivation of the catalyst.



中文翻译:

氯介导化学气相沉积中氯对碳纳米管林生长促进作用的研究

我们研究了氯对通过化学气相沉积法生长的碳纳米管 (CNT) 的生长促进作用,其中 FeCl 2用作催化剂前体。碳纳米管林的横截面观察表明,FeCl 2衍生的催化剂表现出类似液体的行为,并导致金属催化剂掺入碳纳米管中。当在碳纳米管合成过程中人为加入氯气流时,催化剂进一步软化,增加了碳纳米管中金属的填充量。这种软化作用增强了催化剂对碳的吸收和扩散,从而通过抑制催化剂的失活,在 820 ℃ 的高温下形成毫米长的高密度森林。

更新日期:2021-04-07
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