Burgers vectors b of threading dislocations in freestanding GaN substrates were identified through statistical classification using the etch pit and multiphoton-excitation photoluminescence methods. The b=1a+1c threading mixed dislocations were propagated with large inclination angles more than four degrees from the c-axis to minimize elastic strain energy. The b=1c threading edge dislocations had a large contrast difference of more than 0.4 in the photoluminescence image due to their strong nonradiative properties. Based on these characteristics obtained through multiphoton-excitation photoluminescence measurements, major types of dislocations (b=1a, 1a+1c, 1c) could statistically be identified.

通过使用蚀刻坑和多光子激发光致发光方法的统计分类来识别独立式 GaN 衬底中的穿透位错的Burgers 矢量b 。b = 1 a +1 c穿透混合位错以距c轴超过 4 度的大倾角传播，以最小化弹性应变能。b = 1 c穿透刃位错由于其强的非辐射特性，在光致发光图像中具有大于0.4的大对比度差异。基于通过多光子激发光致发光测量获得的这些特性，主要类型的位错（b =1 a , 1 a +1 c , 1 c ) 可以统计识别。