In-situ self-calibration can fundamentally solve the problem of long-term stability of the accelerometer. The implementation of external integrated micro structure to provide physical excitation has become an effective method to compensate for the long-term drift error of the accelerometer. A closed-loop self-calibration system for accelerometers by integrating sensors and actuators is presented. The piezoelectric MEMS microvibrator acts as an acceleration source, providing a standard acceleration for the accelerometer integrated on it. An optical displacement sensing system consisting of vertical cavity surface emitting laser (VCSEL) and photodiodes (PDs) detects the motion state of the microvibrator to achieve the accurate output by closed-loop control. The self-calibration process of the accelerometer is performed by establishing an error model of the accelerometer and a vibration model of the integrated micro-vibrator. The drift error of the accelerometer is compensated by obtaining the error coefficient and the compensation coefficient. It has been verified that the error of the self-calibrated accelerometer when performing 15 g acceleration output is less than 1.5%.

现场自校准可以从根本上解决加速度计的长期稳定性问题。外部集成微结构的实现以提供物理激励已成为补偿加速度计长期漂移误差的有效方法。通过集成传感器和执行器，提出了一种用于加速度计的闭环自校准系统。压电MEMS微振动器充当加速度源，为集成在其上的加速度计提供标准加速度。由垂直腔表面发射激光器（VCSEL）和光电二极管（PD）组成的光学位移传感系统检测微振子的运动状态，并通过闭环控制实现精确的输出。通过建立加速度计的误差模型和集成微型振动器的振动模型来执行加速度计的自校准过程。通过获得误差系数和补偿系数来补偿加速度计的漂移误差。已经证实，执行15 g加速度输出时，自校准加速度计的误差小于1.5％。