Abstract

The results of applying the methods of scanning electron microscopy and electron-probe microanalysis (SEM–EPMA) in combination with etching of the surface of the microparticles with an ion beam to study the composition and internal structure of single microparticles of uranium tetrafluoride are presented. It is shown that the accuracy of analysis of relief samples can be significantly improved if their relief is preliminarily smoothed by an ion beam. The standard deviation in determining the uranium weight content in microparticles of uranium tetrafluoride after smoothing of their surface with an ion beam decreases from (6.1–8.7) to (1.3–2.7)%.

中文翻译：

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Sem-Epma方法提高测定含铀微粒的元素组成的准确性

摘要

提出了应用扫描电子显微镜和电子探针显微分析（SEM-EPMA）的方法结合离子束对微粒表面进行蚀刻以研究四氟化铀单个微粒的组成和内部结构的结果。结果表明，如果用离子束预先平滑浮雕样品，可以大大提高浮雕样品的分析精度。用离子束将其表面平滑后，确定四氟化铀微粒中铀重量含量的标准偏差从（6.1-8.7）％从（1.3-2.7）％减小。