We propose a method for reconstructing the thickness variation of one layer of interest inside a multi-layered structure. This reconstruction is based on inverting far-infrared reflection measurements at a few distinct frequencies. This real-time method allows non-destructive evaluation of a multi-layered structure to better control its manufacturing process, whereas other methods have acquisition or computation times that are not compatible with real-time non-destructive evaluation. Two simulated data and one real data based experiments revealed that the method we propose is robust against measurement noise.

中文翻译：

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通过基于模型的详尽分析进行远红外厚度测量

我们提出了一种用于重建多层结构内部感兴趣的层的厚度变化的方法。这种重建是基于在几个不同的频率上对远红外反射测量值进行反转。这种实时方法允许对多层结构进行无损评估，以更好地控制其制造过程，而其他方法的采集或计算时间与实时无损评估不兼容。基于两个仿真数据和一个基于真实数据的实验表明，我们提出的方法对测量噪声具有鲁棒性。