Installing manufacturing metrology as close as possible to the production line is the key to short feedback times to process parameters. Apart from finding the appropriate measurement technique with the required resolution, the solution has to be applied under unavoidable production conditions. Although white light interferometers (WLI), which provide surface data with details in micro- and nanometer dimensions, are accepted as important tools of modern manufacturing metrology, it should be borne in mind that environmental factors like vibrations may be a significant contributor to the measurement uncertainty without appropriate precautions. Measured surface topography raw data can be affected by disturbances of the optical path length of the interferometer caused by e.g. vibrational excitation, which is typical in the production environment, or by local variations of the refractive index of the medium caused by turbulence due to strong temperature variations. A new method which significantly reduces the effects of these environmental interferences is described in this paper. Unlike other techniques, which tend to create artefacts that are larger in amplitude than the disturbances, the new method is more robust and does not require explicit identification and compensation of external noise. Following a description of the implementation of this robust method, some case studies from real world applications are shown.

尽可能在生产线附近安装制造度量衡是缩短对工艺参数的反馈时间的关键。除了找到具有所需分辨率的合适测量技术外，该解决方案还必须在不可避免的生产条件下应用。尽管提供具有微米和纳米级细节的表面数据的白光干涉仪（WLI）被认为是现代制造计量学的重要工具，但应牢记，诸如振动之类的环境因素可能是测量的重要因素没有适当预防措施的不确定性。所测量的表面形貌原始数据可能会受到干涉仪的光路长度干扰的影响，例如在生产环境中，振动激励会引起这种干扰，或由于强烈的温度变化而由湍流引起的介质折射率的局部变化。本文介绍了一种新的方法，该方法可大大减少这些环境干扰的影响。与其他技术相比，其他技术往往会产生幅度比干扰更大的伪像，而新技术则更鲁棒，并且不需要显式识别和补偿外部噪声。在描述了这种强大方法的实现之后，展示了一些来自实际应用的案例研究。这种新方法往往会产生幅度大于干扰的伪像，因此这种新方法更鲁棒，不需要明确识别和补偿外部噪声。在描述了这种强大方法的实现之后，展示了一些来自实际应用的案例研究。这种新方法往往会产生幅度大于干扰的伪像，因此这种新方法更鲁棒，不需要明确识别和补偿外部噪声。在描述了这种强大方法的实现之后，展示了一些来自实际应用的案例研究。