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Analysis of Digital Images in Order to Control the Manufacturing of Integrated Circuits
Pattern Recognition and Image Analysis Pub Date : 2021-04-08 , DOI: 10.1134/s1054661821010077
A. A. Doudkin , A. V. Inyutin

Abstract

This paper offers a brief overview of the main theoretical and practical results in digital image processing in the manufacturing of integrated circuits (ICs), obtained by the authors and staff of the Laboratory for Systems Identification of the United Institute for Informatics Problems of the National Academy of Sciences of Belarus. The developed methods, algorithms, and computer analysis technology combine conventional digital processing methods and neural networks. This ensures robust recognition and optical inspection of the objects of layouts of ICs with the desired accuracy. The obtained results are used at the leading enterprises of electronic engineering of the Republic of Belarus in VLSI designing and manufacturing, as well as in the fabrication of optical inspection units for VLSI semiconductor wafers.



中文翻译:

分析数字图像以控制集成电路的制造

摘要

本文简要概述了集成电路(IC)制造中数字图像处理的主要理论和实践成果,这些成果是由美国国家科学院信息问题联合研究所系统识别实验室的作者和工作人员获得的白俄罗斯科学学院。所开发的方法,算法和计算机分析技术将常规的数字处理方法和神经网络相结合。这样可确保以所需的精度对IC布局的对象进行可靠的识别和光学检查。所获得的结果可用于白俄罗斯共和国电子工程的领先企业进行VLSI设计和制造,以及用于VLSI半导体晶片的光学检测装置的制造。

更新日期:2021-04-08
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