This paper presents a systematic approach to transduction optimization of resonant piezo-based MEMS devices. The method is based on inverse design approach using direct piezoelectric effect and exploits mechanical action of desired mode to calculate the polarization map of the piezoelectric ceramics. Optimal transduction is achieved by matching the excited electric field distribution to the inversely retrieved polarization map using the electrode segmentation and topology optimization technique. The proposed method was applied to improve the design of existing state-of-the-art piezoelectric MEMS mirrors. The optimized devices feature 70% increase in the optical scan angle ( $\theta _{\mathrm {opt}}$ ) as well as 47 % reduction in power consumption compared to original design. At the same optical scan angle, the optimized devices required 2.28-fold less driving voltage amplitude. [2020-0342]

中文翻译：

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通过反设计和电极分割优化谐振PZT MEMS镜

本文提出了一种基于共振的基于压电的MEMS器件的换能优化的系统方法。该方法基于使用直接压电效应的逆设计方法，并利用所需模式的机械作用来计算压电陶瓷的极化图。通过使用电极分割和拓扑优化技术将激发的电场分布与反向检索的极化图进行匹配，可以实现最佳转换。所提出的方法被用于改善现有技术水平的压电MEMS反射镜的设计。经过优化的设备的光学扫描角度增加了70％（ $ \ theta _ {\ mathrm {opt}} $ ），与原始设计相比，功耗降低了47％。在相同的光学扫描角度下，优化的器件所需的驱动电压幅度要少2.28倍。[2020-0342]