Photonic Integrated Circuits (PICs) benefit from the technology advances in the semiconductor industry to incorporate an ever-increasing number of photonic components on a single chip to create large-scale photonic integrated circuits. We here present a broadband, compact and low-loss Silicon Photonic MEMS switch based on a Single-Pole Double-Throw (SPDT) architecture, where curved electrostatic actuators mechanically displace a movable input waveguide to redirect the optical signal on chip efficiently to either of two output waveguides. The photonic switch has been fabricated in an established silicon photonics technology platform with custom MEMS release post-processing. With a compact footprint of $\mathbf {65\times 62}\, \boldsymbol {\mu }\mathbf {m}^{\mathbf {2}}$ , the switch exhibits an extinction ratio exceeding 23 dB over 70 nm optical bandwidth, a low insertion loss and a fast response time below $1~\mu \text{s}$ , meeting the requirements for integration in large-scale reconfigurable Photonic Integrated Circuits. [2020-0391]

中文翻译：

---

宽带紧凑型单刀双掷硅光子MEMS开关

光子集成电路（PIC）得益于半导体行业的技术进步，将越来越多的光子组件集成在单个芯片上，从而创建了大规模的光子集成电路。我们在此展示一种基于单刀双掷（SPDT）架构的宽带，紧凑且低损耗的硅光子MEMS开关，其中弯曲的静电执行器机械地移动可移动的输入波导，以将芯片上的光信号有效地重定向到其中一个两个输出波导。光子开关已在具有定制MEMS版本后处理功能的现有硅光子技术平台中制造。占地面积小 $ \ mathbf {65 \ times62} \，\ boldsymbol {\ mu} \ mathbf {m} ^ {\ mathbf {2}} $ ，该开关在70 nm光带宽上的消光比超过23 dB，插入损耗低，响应时间短，响应时间短 $ 1〜\ mu \ text {s} $ ，满足在大规模可重构光子集成电路中集成的要求。[2020-0391]