Corrections to “Design, Optimization, and Realization of a High Performance MOEMS Accelerometer From a Double-Device-Layer SOI Wafer”,Journal of Microelectromechanical Systems

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Corrections to “Design, Optimization, and Realization of a High Performance MOEMS Accelerometer From a Double-Device-Layer SOI Wafer”
Journal of Microelectromechanical Systems ( IF 2.7 ) Pub Date : 2021-04-05 , DOI: 10.1109/jmems.2020.3048739
Qianbo Lu ₁ , Jian Bai ₁ , Kaiwei Wang ₁ , Sailing He ₁

Affiliation

In the above article [1] , the content of this article remains untouched. Only Table III is rectified. The stiffness of the proposed MOEMS accelerometer listed in Table III should be half of that value, which is 0.56 N/m.

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