This paper reports the design, modeling, and control of a novel three-degrees-of-freedom piezoelectric compliant microstage by introducing a new double-rocker mechanism. The double-rocker mechanism combines a first (leverage) amplifier and a second (rocker) amplifier for double-stage displacement amplification and parasitic motion reduction. An analytical model is established to calculate the deformation behavior of the microstage, and the model is verified using finite-element analysis (FEA). An improved Prandtl-Ishlinskii (PI) model is proposed to describe piezoelectric hysteresis characteristics by optimizing the threshold selection. Then, a composite control strategy is designed to achieve precision trajectory control. The control strategy consists of a hysteresis-based feedforward controller and a proportional-integral feedback controller. A prototype of the microstage is manufactured, and an experimental system is established. Several open-loop and closed-loop experiments are conducted, and the experimental results validate the effectiveness of the proposed microstage and the designed control strategy.

本文通过介绍一种新型的双摇杆机构，报告了一种新型的三自由度压电顺应微台的设计，建模和控制。双摇杆机构结合了第一（杠杆）放大器和第二（摇杆）放大器，用于双级位移放大和寄生运动减小。建立分析模型以计算微台的变形行为，并使用有限元分析（FEA）对该模型进行验证。提出了一种改进的Prandtl-Ishlinskii（PI）模型，通过优化阈值选择来描述压电滞后特性。然后，设计了一种复合控制策略来实现精确的轨迹控制。控制策略包括基于磁滞的前馈控制器和比例积分反馈控制器。制造了微型载物台的原型，并建立了实验系统。进行了几个开环和闭环实验，实验结果验证了所提出的微台和设计的控制策略的有效性。