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Application of the triple Langmuir probe to study local plasma parameters in the radiofrequency discharge that is placed in an additional applied magnetostatic field
Physics of Plasmas ( IF 2.2 ) Pub Date : 2021-03-01 , DOI: 10.1063/5.0032306
Vladimir Kozhevnikov 1 , Andrey Melnikov 2 , Sergey Khartov 1, 2
Affiliation  

This paper considers the application of the triple Langmuir probe method to investigate the local plasma parameters of the radio frequency (RF) discharge that is placed in the applied magnetostatic field. The main criteria applicability for such a method for experimental diagnostics of RF plasma parameters is presented. As an example, this paper presents experimental results that were obtained using the proposed method on local plasma parameters in one of the cross sections of the discharge chamber of the RF ion source with an applied magnetostatic field. The influence of the magnetostatic field on the radial distributions of charged particle density and electron temperature is shown.

中文翻译:

三重Langmuir探头在研究放置在附加静磁场中的射频放电中的局部等离子体参数中的应用

本文考虑了三重Langmuir探针方法的应用,以研究放置在施加的静磁场中的射频(RF)放电的局部等离子体参数。提出了这种方法用于RF等离子体参数的实验诊断的主要标准适用性。例如,本文介绍了使用所建议的方法对施加了静磁场的RF离子源放电室横截面之一中的局部等离子体参数所获得的实验结果。显示了静磁场对带电粒子密度和电子温度的径向分布的影响。
更新日期:2021-03-31
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