The effect of a laminated structure on Conetic films made with sputtering deposition is investigated for application in micro magnetic flux concentrators. It is demonstrated that even with the total magnetic thickness being several micrometers, laminated magnetic films can exhibit significantly reduced coercivity and saturation field compared to single-layer films with the same total magnetic thickness. On the micrometer level, reduction of stress and magnetostriction should be the major reason for significantly improved softness of laminated Conetic films, while cross-layer magnetostatic coupling is also helpful. The improved softness is available not only at room temperature but also at low temperatures. Therefore, with laminated micro magnetic flux concentrators applied in magnetic sensors, the improved softness due to the laminated structure should yield improved reversibility and sensitivity of magnetic sensors at room temperature or low temperatures.

中文翻译：

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用于微磁通量集中器的叠层磁性膜

研究了层压结构对通过溅射沉积制备的Conetic膜的影响，以用于微磁通量集中器。已经证明，即使总磁性厚度为几微米，与具有相同总磁性厚度的单层膜相比，层压磁性膜也可以表现出显着降低的矫顽力和饱和场。在微米级别上，应力和磁致伸缩的降低应是显着改善层压Conetic膜的柔软性的主要原因，而跨层静磁耦合也是有帮助的。不仅在室温下，而且在低温下，都可获得改善的柔软度。因此，将叠层式微磁通集中器应用于磁传感器时，