Force sensors that are thin, low-cost, flexible, and compatible with commercial microelectronic chips are of great interest for use in biomedical sensing, precision surgery, and robotics. By leveraging a combination of microfluidics and capacitive sensing, we develop a thin, flexible force sensor that is conformable and robust. The sensor consists of a partially filled microfluidic channel made from a deformable material, with the channel overlaying a series of interdigitated electrodes coated with a thin, insulating polymer layer. When a force is applied to the microfluidic channel reservoir, the fluid is displaced along the channel over the electrodes, thus inducing a capacitance change proportional to the applied force. The microfluidic molds themselves are made of low-cost sacrificial materials deposited via aerosol-jet printing, which is also used to print the electrode layer. We envisage a large range of industrial and biomedical applications for this force sensor.

薄型，低成本，柔性且可与商业微电子芯片兼容的力传感器在生物医学传感，精密手术和机器人技术中非常受关注。通过将微流体技术和电容式传感技术结合使用，我们开发出了一种薄而灵活的力传感器，该传感器既舒适又坚固。该传感器由一个由可变形材料制成的部分填充的微流体通道组成，该通道覆盖了一系列相互交叉的电极，这些电极涂有一层薄的绝缘聚合物层。当将力施加到微流体通道储存器时，流体沿通道在电极上方移动，从而引起与所施加的力成比例的电容变化。微流体模具本身由通过喷雾喷涂沉积的低成本牺牲材料制成，也用于印刷电极层。我们为这种力传感器设想了广泛的工业和生物医学应用。