This paper investigates the influence of the driving frequency on the dynamics of a single dust particle in argon radiofrequency discharge. A one-dimensional fluid model is presented and solved in the entire inter-electrode domain using the finite difference method. In order to solve the particle equation of motion, the coefficients describing the amplification and the damping of the dust particle oscillations are analytically calculated around the equilibrium position, these coefficients allow us to find the relation between the plasma and dust parameters. The results obtained cover the discharge characteristics, the charge and the dynamics of the dust particle. It has been found that the driving frequency has a significant effect on not only the discharge properties but also on the damped oscillatory motion and the equilibrium position of the dust particle. Hence, these oscillations become closer to the electrodes with increasing driving frequency whereas the dust equilibrium position becomes relatively farther from the powered electrode when the dust size decreases.

中文翻译：

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射频电容氩放电中驱动频率对尘粒动力学的影响

本文研究了驱动频率对氩射频放电中单个尘粒动力学的影响。使用有限差分法在整个电极间域中提出并求解一维流体模型。为了求解粒子运动方程，在平衡位置附近解析计算了描述尘埃粒子振荡放大和阻尼的系数，这些系数使我们能够找到等离子体和尘埃参数之间的关系。得到的结果涵盖了尘粒的放电特性、电荷和动力学。已经发现，驱动频率不仅对排放特性有显着影响，而且对阻尼振荡运动和尘粒的平衡位置也有显着影响。因此，随着驱动频率的增加，这些振荡变得更靠近电极，而当灰尘尺寸减小时，灰尘平衡位置变得相对远离通电电极。