Optics and Spectroscopy ( IF 0.6 ) Pub Date : 2021-03-19 , DOI: 10.1134/s0030400x20121042 V. A. Shvets , D. V. Marin , V. G. Remesnik , I. A. Azarov , M. V. Yakushev , S. V. Rykhlitskii
Abstract
A parametric model describing the spectra of optical constants n(λ) and k(λ) of a Hg1 – xCdxTe (MCT) solid solution for the x values in the range from 0.2 to 0.4 is developed. This model is based on empirical data measured in situ during the epitaxial growth of solid-solution layers. Several versions of application of the obtained model for in situ real-time determination of the MCT composition have been considered. A technique for determining the composition using spectral ellipsometric measurements is proposed, which ensures the error of no more than δx = ±0.0035.
中文翻译:
Hg 1-x Cd x Te的光学常数光谱参数模型及化合物组成的测定
摘要
建立了一个参数模型,该模型描述了Hg 1 – x Cd x Te(MCT)固溶体的x值在0.2到0.4范围内的光学常数n(λ)和k(λ)的光谱。该模型基于固溶层外延生长期间现场测量的经验数据。已经考虑了所获得模型的多个版本的应用,以用于MCT成分的原位实时确定。一种使用光谱椭偏测量来确定该组合物的技术,提出了一种保证的误差不超过δ X =±0.0035。