The characteristic of the microelectromechanical systems (MEMS) structures can be determined by using static, modal and harmonic analyses implemented with finite element method (FEM) software packages. In the current study, two different algorithms for the open-source Elmer FEM are developed to analyze not only the biased modal analysis but also harmonic response. The proposed algorithms are implemented in Elmer FEM by using the design parameters of a MEMS structure already presented in the literature. Furthermore, as the same MEMS structure was also analyzed by using a commercial software, the simulation results of Elmer FEM are also checked with those of the commercial software. The result of Elmer FEM is almost consistent with the experimental value of the reported structure for the center frequency. Furthermore, the difference between the simulation results of Elmer FEM and those of commercial software for the same simulation conditions is almost in the range of 7% and 2.4% for the displacement and the resonance frequency, respectively. It is thought that the proposed algorithms can also be used to analyze more complex MEMS structures such as resonator and accelerometer for determining characteristic features.

微机电系统（MEMS）结构的特性可以通过使用通过有限元方法（FEM）软件包实施的静态，模态和谐波分析来确定。在当前的研究中，为开源Elmer FEM开发了两种不同的算法，不仅可以分析偏置模态分析，还可以分析谐波响应。通过使用文献中已经介绍过的MEMS结构的设计参数，在Elmer FEM中实现了所提出的算法。此外，由于还使用商用软件分析了相同的MEMS结构，因此还使用商用软件检查了Elmer FEM的仿真结果。Elmer FEM的结果与中心频率报告结构的实验值几乎一致。此外，在相同的模拟条件下，Elmer FEM与商用软件的模拟结果之间的差异在位移和共振频率上分别几乎在7％和2.4％的范围内。可以认为，所提出的算法还可以用于分析更复杂的MEMS结构，例如谐振器和加速度计，以确定特征。