We report a novel approach for realizing tunable/reconfigurable terahertz (THz) mesh filters on the basis of micromachined mesa‐array structures. In this approach, different filter patterns are generated virtually using photogenerated free carriers in a semiconducting mesa‐array structure to achieve superior tunability and reconfigurability. Micromachined mesa‐array structures enable the formation of high fidelity, optically generated mesh filter structures for THz frequencies. To evaluate the proposed filter designs, the optically patterned spatial modulation properties of mesa‐array structures were first evaluated. Reconfigurable mesh filter prototypes were then designed and simulated using silicon mesa arrays with 50 × 50 μm² square mesa unit cells. Simulations show that reconfigurable bandpass filters (BPFs) operating in the frequency range of 108–489 GHz with insertion losses of 0.82–1.13 dB can be achieved. By employing smaller unit cells, the frequency tuning range and filtering performance can be further improved. In addition to BPFs, other filter functionalities can also be realized utilizing the proposed approach. The wide tuning range and reconfigurability of the mesh filters demonstrate that the proposed approach is promising for developing tunable/reconfigurable circuits and components for advanced THz sensing, imaging, and communications.

中文翻译：

---

使用台面阵列的光控可重构太赫兹网格滤波器的计算分析

我们报告了一种在微加工台面阵列结构的基础上实现可调谐/可重新配置的太赫兹（THz）网格滤波器的新颖方法。在这种方法中，使用光生自由载流子以半导体台面阵列结构虚拟地产生了不同的滤波器模式，以实现出色的可调性和可重构性。微加工的台面阵列结构能够形成高保真度，光学产生的太赫兹频率网状滤波器结构。为了评估所提出的滤波器设计，首先评估了台面阵列结构的光学图案化空间调制特性。可重新配置的筛网过滤器的原型然后设计和模拟使用硅台面阵列，50×50微米²方形台面晶胞。仿真表明，可以实现在108-489 GHz频率范围内工作，插入损耗为0.82-1.13 dB的可重构带通滤波器（BPF）。通过采用较小的单位单元，可以进一步改善频率调谐范围和滤波性能。除了BPF，还可以利用提出的方法来实现其他滤波器功能。网状滤波器的宽调谐范围和可重新配置性表明，所提出的方法有望为开发用于高级THz感测，成像和通信的可调谐/可重新配置电路和组件。