Closed-field unbalanced magnetron sputtering ion plating was used to form CrAlMoN films on the surface of single-crystal silicon and tool steel. The composition and morphology of the films were determined through energy-dispersive X-ray spectroscopy, scanning electron microscopy, and transmission electron microscopy. High-temperature friction and wear properties of CrAlMoN films were assed using a friction and wear tester and by studying the film cross-sections. The hardness of CrAlMoN films was determined using a nanoindenter. Results showed that CrAlMoN films have a nanomultilayer structure, with the same fcc structure as CrN. At room temperature, the hardness and wear resistance of CrAlMoN films are greater than that of CrAlN films. The friction properties of CrAlMoN films varied widely with an increase in the temperature. At 600 °C, the friction performance of CrAlMoN films degrades rapidly, and the degree of film wear is significantly increased. In contrast, CrAlN films retain high wear resistance at 600 °C.

使用闭场不平衡磁控溅射离子镀在单晶硅和工具钢的表面上形成CrAlMoN膜。通过能量色散X射线光谱，扫描电子显微镜和透射电子显微镜确定膜的组成和形态。CrAlMoN薄膜的高温摩擦和磨损性能是使用摩擦磨损测试仪并通过研究薄膜的横截面来评估的。CrAlMoN膜的硬度使用纳米压头确定。结果表明，CrAlMoN薄膜具有纳米多层结构，与CrN具有相同的fcc结构。在室温下，CrAlMoN膜的硬度和耐磨性大于CrAlN膜的硬度和耐磨性。CrAlMoN薄膜的摩擦性能随温度的升高而变化很大。在600°C下，CrAlMoN薄膜的摩擦性能迅速下降，并且薄膜的磨损程度显着增加。相反，CrAlN膜在600°C时仍具有较高的耐磨性。