Nano-resonators are increasingly used to study fundamental phenomena in dynamical systems. Strain tuning of resonance frequency provides an additional control knob in experiments that use these devices. In this work, we present a simple technique to tune the strain in these nano-resonators by controllably deforming a small section of the silicon substrate. We fabricate the graphene nano-resonators on a thinned circular region on the Si/SiO₂ substrate. This circular diaphragm can be easily deformed by creating a pressure difference across it. We achieve this using a simple printed circuit board and KF-flange assembly. With this setup, we can produce a strain change of 12 10⁻⁵ on the device, with 1 bar pressure difference. This strain is enough to observe a corresponding frequency shift of 9 MHz. The proposed method to produce strain in the nano-resonators is free from any fabrication constraints and can be utilized for a wide variety of nano-resonators.

纳米谐振器越来越多地用于研究动力学系统中的基本现象。在使用这些设备的实验中，谐振频率的应变调整提供了额外的控制旋钮。在这项工作中，我们提出了一种简单的技术，通过可控地变形硅衬底的一小部分来调整这些纳米谐振器中的应变。我们在Si / SiO ₂基板上的圆形区域上制作了石墨烯纳米谐振器。通过在圆形隔膜上产生压力差，可以很容易地使其变形。我们使用简单的印刷电路板和KF法兰组件来实现这一目标。通过这种设置，我们可以产生12 10 ^-5的应变变化在设备上，压力差为1 bar。该应变足以观察到9 MHz的相应频移。所提出的在纳米谐振器中产生应变的方法不受任何制造约束，并且可以用于各种各样的纳米谐振器。