High-power microvacuum electronic devices are one of the key technologies for the study of terahertz radiation sources. The traveling-wave tube (TWT) based on the folded waveguide slow-wave structure is the most promising terahertz device. This article designs the structural parameters of an H-plane ridge-loaded folded waveguide to improve the maximum output power of TWTs in the atmospheric window at 0.34 THz. The results predicted by a theoretical model and by electromagnetic (EM) simulation indicate the interaction impedance of the slow-wave structure is significantly increased. The simulation results show that the design is capable of raising the maximum output power to more than 50 W at 0.34 THz, with sheet electron beam parameters of 16.8 kV and 50 mA. The power gain, the 3-dB bandwidth, and the electronic efficiency of the folded waveguide can reach 30.5 dB, 10 GHz, and 6%, respectively. Finally, the designed slow-wave structure is microfabricated using multistep UVLIGA technology.

中文翻译：

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0.34-THz大功率慢波结构的设计与微细加工

高功率微真空电子设备是太赫兹辐射源研究的关键技术之一。基于折叠波导慢波结构的行波管（TWT）是最有前途的太赫兹器件。本文设计了H面脊加载折叠波导的结构参数，以改善在0.34 THz的大气窗口中TWT的最大输出功率。理论模型和电磁（EM）模拟预测的结果表明，慢波结构的相互作用阻抗显着增加。仿真结果表明，该设计能够在0.34 THz的频率下将最大输出功率提高到50 W以上，并且薄板电子束参数为16.8 kV和50 mA。功率增益，3 dB带宽，折叠波导的电子效率可以分别达到30.5 dB，10 GHz和6％。最后，使用多步UVLIGA技术对设计的慢波结构进行微制造。