The surface reflectance at micro scale is mainly dominated by wave effect and cannot be explained by geometric ray model. In this paper, we use wave optics to analyze the incoherent reflectivity and gained important insights into the establishment of the diffraction BRDF model of scratched material surface. In order to confirm the model given, we improve the BRDF measurement method into the sub-aperture scanning Fourier transform system. The experimental data are in good agreement with the theoretical model. The proposed scratch diffraction BRDF model is more suitable to describe the actual physical process, and can provide theoretical basis for proposing detection scheme for scratches of different standards. The model can also be used to analyze the stray light of scratched material surface and the target characteristics of multi texture surface.

微观尺度上的表面反射率主要由波效应决定，不能用几何射线模型来解释。在本文中，我们使用波光学来分析非相干反射率，并获得了对划痕材料表面衍射BRDF模型建立的重要见解。为了确认给出的模型，我们将BRDF测量方法改进为子孔径扫描傅里叶变换系统。实验数据与理论模型吻合良好。提出的划痕衍射BRDF模型更适合描述实际的物理过程，可以为提出不同标准划痕的检测方案提供理论依据。该模型还可用于分析划伤材料表面的杂散光和多纹理表面的目标特性。