Aspheric optics has been widely employed in some high-tech industries for its superiority. In order to achieve the ultra-precision machining of these aspheric surfaces, the large optical ultra-precision grinding machine becomes crucial because it determines the efficiency of the whole process. As the key functional unit in ultra-precision machine tool, the hydrostatic guideways are commonly adopted for the excellent performance. However, the motion errors of hydrostatic guideways have a direct influence on the accuracy of the machined workpiece, and some analysis approaches have been reported correspondingly. Although the existed analysis models do work, their imperfections also can be easily captured. Accordingly, a novel analysis model with less imperfection is deserved to be developed. In this paper, the kinematic theory is utilized to establish the quasi-static analysis model for motion errors in closed hydrostatic guideways. Through the large ultra-precision grinding machine designed by our research group, the consistently good agreement between the predicted results and the measured experimental data are obtained. Furthermore, it is found that the motion accuracy is more sensitive to the profile error of the guide rail bearing the external load rather than that of the other guide rail in the closed hydrostatic guideway. The presented research is supposed to be valuable to the peer designers.

非球面光学器件因其优越性而被广泛应用于某些高科技行业。为了实现这些非球面的超精密加工，大型光学超精密磨床变得至关重要，因为它决定了整个过程的效率。作为超精密机床的关键功能单元，静液压导轨通常被采用以实现卓越的性能。然而，静液压导轨的运动误差直接影响加工后工件的精度，相应地报告了一些分析方法。尽管现有的分析模型确实有效，但它们的缺陷也可以很容易地捕获。因此，值得开发一种具有较少缺陷的新颖分析模型。在本文中，利用运动学理论建立了静液压导轨运动误差的准静态分析模型。通过我们研究小组设计的大型超精密磨床，在预测结果和实测实验数据之间始终保持良好的一致性。此外，已经发现，运动精度对承受外部载荷的导轨的轮廓误差比在封闭的静液压导轨中的另一导轨的轮廓误差更为敏感。提出的研究应该对同行设计者来说是有价值的。获得了预期结果与实测实验数据之间的一致良好一致性。此外，已经发现，运动精度对承受外部载荷的导轨的轮廓误差比在封闭的静液压导轨中的另一导轨的轮廓误差更为敏感。提出的研究应该对同行设计者来说是有价值的。获得了预期结果与实测实验数据之间的一致良好一致性。此外，已经发现，运动精度对承受外部载荷的导轨的轮廓误差比在封闭的静液压导轨中的另一导轨的轮廓误差更为敏感。提出的研究应该对同行设计者来说是有价值的。