Herein, the use of Hastelloy C-276 as a cathodic cage for the deposition of thin films on the AISI 316L steel substrate by plasma is investigated. The films are processed through floating potential at 350, 375, 400, and 425 °C for 4 h, using a hydrogen–nitrogen mixture in the proportion of 40% and 60%, respectively. The thin films are investigated by X-ray diffraction, scanning electron microscopy, Raman spectroscopy, and potentiodynamic polarization. The spectroscopy results point out the formation of different phases such as FeNi₃, CrNi, and MoN_1/2. Films acquired at 375 ºC present superior corrosion resistance with less negative corrosion potential (−0.020 V). The increase and decrease in FeNi₃ and CrNi contents follow the improvement of the applied temperature, which is unbeneficial to the corrosion resistance of the films.

中文翻译：

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用哈氏合金作为阴极笼等离子对AISI 316L钢上形成的薄膜的耐蚀性进行评估

在本文中，研究了将Hastelloy C-276用作阴极笼，通过等离子体在AISI 316L钢基材上沉积薄膜的方法。分别使用比例为40％和60％的氢气-氮气混合物，通过在350、375、400和425°C的浮动电位下处理薄膜4小时。通过X射线衍射，扫描电子显微镜，拉曼光谱和电位动力学极化研究薄膜。光谱结果指出了诸如FeNi ₃，CrNi和MoN _1/2的不同相的形成。在375ºC下获得的膜表现出优异的耐腐蚀性，负腐蚀电位（-0.020 V）更低。FeNi ₃的增加和减少 CrNi的含量随施加温度的提高而变化，这不利于薄膜的耐蚀性。