In this contribution, we describe the design, technology, and physical parameters of antenna-coupled microbolometer, used for broadband detection of terahertz electromagnetic spectrum. This microbolometer features an application of La_0.67Sr_0.33MnO₃ layer grown on multilayered material stack ensuring lattice matching of the sensing LSMO layer to silicon. By virtue of bulk micromachining of silicon-on-insulator substrates, the sensing structure is built on thin suspended membrane to provide weak thermal link, increasing thermal response, thus sensitivity. Additionally, it helps suppressing excitation of in-plane guided surface modes that will otherwise deteriorate the antenna radiation diagram and affect the spectral responsivity of the sensor. Finally, the operation of sensor is demonstrated using a molecular laser setup at 762 GHz (and also 1.4 THz) emission line. The parameters of the said microbolometers are analyzed in terms of response and time constant. Optimal working temperature of the detectors is about 65 °C.

在本文中，我们描述了用于太赫兹电磁频谱的宽带检测的天线耦合微测辐射热计的设计，技术和物理参数。该微辐射热仪的特点是应用了La _0.67 Sr _0.33 MnO ₃在多层材料叠层上生长的氮化硅层确保传感LSMO层与硅的晶格匹配。通过对绝缘体上硅衬底进行整体微加工，传感结构建立在薄的悬浮膜上，以提供较弱的热链接，从而提高了热响应，从而提高了灵敏度。另外，它有助于抑制平面引导表面模式的激发，否则将破坏天线辐射图并影响传感器的光谱响应度。最后，使用分子激光设置在762 GHz（以及1.4 THz）的发射线对传感器的操作进行了演示。根据响应和时间常数来分析所述微辐射热计的参数。检测器的最佳工作温度约为65°C。