Abstract

The authors have carried out an experimental and theoretical study of the propagation of surface acoustic waves (SAW)—Rayleigh, Sezawa and SH-modes, as well as Lamb waves in Me-IDT/AlN/(100) diamond (Me = Pt, Al) piezoelectric layered structures with a SAW resonator configuration. The types of modes are identified and the dispersion curves of the phase velocities and electromechanical coupling coefficients for SAW and Lamb waves are obtained. The excitation of Lamb waves up to a frequency of 7.3 GHz was observed experimentally. The resonance curves for Lamb waves have a higher quality factor Q compared to surface acoustic waves propagating on the same substrates. At a frequency of about 7 GHz, the loaded Q-factor reaches 3400, while the quality parameter Q × f = 2.4 × 10¹³ Hz. An unusual effect of a significant increase in the Q-factor of Lamb waves with the frequency increasing from 760 at 1.5 GHz to 3400 at 7 GHz is noted.

中文翻译：

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金刚石基压电层状结构中超高频率的表面声波和兰姆波的激发

摘要

作者已经对表面声波（SAW）的瑞利，塞泽瓦和SH模式以及Me-IDT / AlN /（100）金刚石中的兰姆波（Me = Pt， A1）具有SAW谐振器配置的压电层状结构。确定了模式的类型，并获得了声表面波和兰姆波的相速度和机电耦合系数的色散曲线。实验中观察到了高达7.3 GHz频率的Lamb波的激发。与在相同基板上传播的表面声波相比，兰姆波的共振曲线具有更高的品质因数Q。在大约7 GHz的频率下，加载的Q因子达到3400，而质量参数Q ×f = 2.4×10 ¹³赫兹 注意到随频率从1.5 GHz的760增加到7 GHz的3400时，兰姆波的Q因子显着增加的不同寻常的影响。