Based on a sandwich-like structure, a microhollow cathode discharge device is designed, and a stable discharge is realized by injecting helium into the discharge region of the device at atmospheric pressure. A wall probe is used to determine the relevant parameters of the plasma generated by the device, such as particle density, electron temperature, and the electron distribution function. At the same time, a sink parameter is used to correct the electron distribution function of the wall-probe diagnostics, and to further study the relationship between electron density and the electron temperature of the corrected electron distribution function.

中文翻译：

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大气压下微空心阴极放电的诊断

基于夹心式结构，设计了微空心阴极放电装置，在大气压下向装置放电区注入氦气，实现稳定放电。壁式探针用于确定设备产生的等离子体的相关参数，例如粒子密度、电子温度和电子分布函数。同时，采用汇参数对壁面探针诊断的电子分布函数进行校正，进一步研究校正后的电子分布函数的电子密度与电子温度的关系。