In the present study Ar+ cluster ions accelerated by voltages in the range of 5–10 kV are used to irradiate single crystal ZnO substrates and nanorods to fabricate self-assembled surface nanoripple arrays. The ripple formation is observed when the incidence angle of the cluster beam is in the range of 30–70°. The influence of incidence angle, accelerating voltage, and fluence on the ripple formation is studied. Wavelength and height of the nanoripples increase with increasing accelerating voltage and fluence for both targets. The nanoripples formed on the flat substrates remind of aeolian sand ripples. The ripples formed at high ion fluences on the nanorod facets resemble well-ordered parallel steps or ribs. The more ordered ripple formation on nanorods can be associated with the confinement of the nanorod facets in comparison with the quasi-infinite surface of the flat substrates.

中文翻译：

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气体团簇离子轰击在ZnO平坦基底和纳米棒上形成纳米波纹

在本研究中，通过5-10 kV电压加速的Ar +团簇离子用于辐照单晶ZnO衬底和纳米棒，以制造自组装表面纳米波纹阵列。当簇束的入射角在30–70°范围内时，观察到波纹形成。研究了入射角，加速电压和注量对波纹形成的影响。纳米波纹的波长和高度随着两个目标的加速电压和通量的增加而增加。在平坦基底上形成的纳米波纹使人联想起风沙的波纹。在纳米棒小平面上以高离子注量形成的波纹类似于排列整齐的平行台阶或肋。