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Calculation of Magnetic Field in the Reactor of RF Magnetized Plasma
IEEE Canadian Journal of Electrical and Computer Engineering ( IF 2 ) Pub Date : 2016-01-01 , DOI: 10.1109/cjece.2015.2510584
Djilali Benyoucef , Rachid Taleb , M'hamed Helaimi , Bachir Belmadani

In this paper, we present an analytical method for calculating the axial and radial components of the magnetic field created by a permanent magnet in the form of a ring used in a magnetron radio frequency (RF) reactor. The calculation is based on the symmetric integral of the first kind; it was performed under a Linux 64-bit operating system. This analytical method allows us to accurately assess the magnetic field, and it allows us to reduce the computational time. Finally, in order to validate the results, they are successfully compared with the results obtained by a numerical method based on finite-difference method.

中文翻译:

射频磁化等离子体反应器中磁场的计算

在本文中,我们提出了一种分析方法,用于计算磁控管射频 (RF) 反应器中使用的环形永磁体产生的磁场的轴向和径向分量。计算基于第一类对称积分;它是在 Linux 64 位操作系统下执行的。这种分析方法使我们能够准确地评估磁场,并减少计算时间。最后,为了验证结果,他们成功地与基于有限差分法的数值方法获得的结果进行了比较。
更新日期:2016-01-01
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