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Monolithic reflector-integrated waveguide photodetector with optical mesa isolation
Infrared Physics & Technology ( IF 3.3 ) Pub Date : 2021-03-04 , DOI: 10.1016/j.infrared.2020.103625
Tao Liu , Meng Yang , Dongyu Li , Yongqing Huang , Youming Shi , Wenjing Fang

Herein, we propose a monolithic reflector-integrated waveguide photodetector with optical isolation between photosensitive mesa and N-contact mesa for achieving a high efficiency bandwidth product. In the proposed photodetector, the photosensitive mesa is optically isolated but electrically connected with the N-contact mesa; this is achieved by etching a portion of the core layer to form a groove on each side of the photosensitive mesa, enhancing the binding of the waveguide to optical power. Furthermore, a mesa is formed separate from the N-contact mesa at the end of the waveguide, and the metal film is deposited to act as a mirror, thereby increasing the effective absorption length of the device. Consequently, the mutual tradeoff between the bandwidth and quantum efficiency of the photodetector could be alleviated.



中文翻译:

具有光学台面隔离的单片反射器集成波导光电探测器

本文中,我们提出了一种在光敏台面和N接触台面之间进行光隔离的单片反射器集成波导光电探测器,以实现高效带宽产品。在所提出的光电探测器中,光敏台面是光学隔离的,但与N接触台面电连接。这是通过蚀刻一部分芯层以在光敏台面的每一侧形成凹槽来实现的,从而增强了波导与光功率的结合力。此外,在波导的端部与N接触台面分开地形成台面,并且沉积金属膜以充当镜,从而增加了装置的有效吸收长度。因此,可以减轻光电探测器的带宽和量子效率之间的相互权衡。

更新日期:2021-03-21
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