Modern electrochemistry contributes significantly to the field of Micro‐System‐Technologies (MST). MST is the base of the global information and communication technology (ICT) driving most aspects of modern life. MST includes Micro and Nano scale manufacturing disciplines such as microelectronics, micro electro mechanical systems, micro‐electro‐optics, microfluidics and more. MST, since its conception, involved many aspects of applied electrochemistry: process modules (i. e. deposition, etching, cleaning etc.), devices (i. e. biosensing, chemical sensing etc.), and energy components (i. e. sources, energy harvesting, storage etc.). We present a brief historical overview, followed by a discussion about the main topic of this work, electrochemistry and MST. To highlight the electrochemistry contribution, two examples are presented demonstrating when electrochemistry provided critical micro technologies. The first is Very Large‐Scale Integration copper metallization, which is already in mass production, and the second is 3D integration of circuits and systems, which is under intense research and development.

中文翻译：

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电化学与微电子学，展望与展望

现代电化学为微系统技术（MST）领域做出了重要贡献。MST是推动现代生活大部分方面的全球信息和通信技术（ICT）的基础。MST包括微米和纳米级制造学科，例如微电子学，微机电系统，微光电学，微流体学等。MST从其概念开始就涉及应用的电化学的许多方面：处理模块（即沉积，蚀刻，清洁等），设备（即生物传感，化学传感等）和能量成分（即源，能量收集，存储等）。 ）。我们将简要概述历史，然后讨论这项工作的主要主题，电化学和MST。为了突出电化学的贡献，给出了两个例子，说明电化学何时提供了关键的微技术。第一个是超大规模集成铜金属化，已经在批量生产中，第二个是电路和系统的3D集成，该技术正在深入研究和开发中。