An ultra‐high resolution Fourier transform spectrometer (FTS) realized in silicon photonic platform that can operate with broad band, narrow band as well as a combination of broad band and narrow band signals is reported. The ultra‐high resolution of the spectrometer is achieved by exploiting multiple techniques: a Michelson interferometer (MI) structure to increase the optical path delay (OPD), a hybrid waveguide design to reduce insertion loss, an optimized heater and air trenches to achieve higher thermal efficiency. Moreover, to further increase the OPD of the spectrometer to increase its resolution, a novel multiple interferometers approach is employed which combines balanced MI with N statically imbalanced MIs, thereby increasing the OPD of a single MI by factor of N + 1. An FTS spectrometer consisting of N = 2 such MIs is fabricated and experimentally characterized using unknown broad bandwidth input signal spectra of about 180 nm centered around 1550 nm, a narrow line laser input signal, and a combination of broad and narrow band signals demonstrating spectral resolution of about 0.16 nm.

中文翻译：

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具有宽带宽和超高分辨率的集成式硅傅里叶变换光谱仪

据报道，在硅光子平台上实现的超高分辨率傅立叶变换光谱仪（FTS）可以在宽带，窄带以及宽带和窄带信号的组合下运行。光谱仪的超高分辨率是通过以下多种技术实现的：迈克尔逊干涉仪（MI）结构以增加光程延迟（OPD），混合波导设计以减少插入损耗，优化的加热器和空气沟槽以实现更高的光谱分辨率热效率。此外，为了进一步提高光谱仪的OPD以提高其分辨率，采用了一种新颖的多重干涉仪方法，该方法将平衡MI与N个静态不平衡MI结合在一起，从而将单个MI的OPD增加了N倍。+1。制造并由N = 2个这样的MI构成的FTS光谱仪，并使用以1550 nm为中心的约180 nm的未知宽带输入信号光谱，窄线激光输入信号以及宽带和窄带信号的组合进行实验表征具有约0.16 nm的光谱分辨率。