The first positive working chemically amplified photosensitive polyimide-carbon black (PSPI-CB) composite with 2,2′-bis(4-(2′-(vinyloxy)ethoxy)phenyl)propane (BPA-DEVE) as a crosslinking agent was prepared. In addition, the triphenylene vinyl ether (TP-VE) monomers 2,3-di-[(2-vinyloxy)ethoxy]triphenylene (TP-DEVE) and 2,3,6,7,10,11-hexa-[(2-vinyloxy)ethoxy]triphenylene (TP-HEVE) were used as novel CB dispersing aids as well as crosslinking agents. The photolithographic performance of TP-DEVE and TP-HEVE as crosslinking agents in the positive working PSPI and PSPI-CB composites was similar to that of BPA-DEVE. The CB dispersion ability of the crosslinking agents used in the present study was evaluated on the basis of the shading ability (optical density) and surface roughness of the PSPI-CB films. Given the same amount of crosslinking agent in the formulation of the PSPI-CB composite, the optical density and surface roughness of the corresponding PSPI-CB composite film were 1.4 and 116.0 nm for PSPI-CB-1 with BPA-DEVE, 1.7 and 78.2 nm for PSPI-CB-2 with TP-DEVE, and 1.9 and 58.4 nm for PSPI-CB-3 with TP-HEVE, respectively. The results confirm that the CB dispersion ability of these crosslinking agents decreases in the order TP-HEVE > TP-DEVE > BPA-DEVE.

制备了以2,2'-双（4-（2'-（（乙烯基氧基）乙氧基）苯基）丙烷（BPA-DEVE）为交联剂的第一个正作用化学放大光敏聚酰亚胺-炭黑（PSPI-CB）复合材料。此外，三亚苯基乙烯基醚（TP-VE）单体2,3-二-[（2-乙烯基氧基）乙氧基]三亚苯基（TP-DEVE）和2,3,6,7,10,11-六-[（ 2-乙烯基氧基）乙氧基]三亚苯基（TP-HEVE）用作新型CB分散助剂和交联剂。在正性PSPI和PSPI-CB复合材料中，TP-DEVE和TP-HEVE作为交联剂的光刻性能与BPA-DEVE相似。本研究中使用的交联剂的CB分散能力是根据PSPI-CB膜的遮光能力（光学密度）和表面粗糙度进行评估的。如果在PSPI-CB复合材料的配方中交联剂的含量相同，则具有BPA-DEVE的PSPI-CB-1的相应PSPI-CB复合膜的光密度和表面粗糙度分别为1.4和116.0 nm，分别为1.7和78.2带有TP-DEVE的PSPI-CB-2的最大波长为100 nm，带有TP-HEVE的PSPI-CB-3的最大波长分别为1.9和58.4 nm。结果证实，这些交联剂的CB分散能力以TP-HEVE＞ TP-DEVE＞ BPA-DEVE的顺序降低。