Zinc oxide (ZnO) nanoparticles and nano-structures were synthesized using RF inductively-coupled thermal plasma system. The ZnO nanoparticles synthesized in high enthalpy plasmas showed high purity and extremely small crystalline characteristics with the (30–50) nm size distribution applicable in various areas. The resultant morphology of the ZnO nanoparticles was influenced by process parameters such as chamber pressure, a cooling method and a reactor configuration. Thus, the effects of process conditions were discussed with perspective of the re-crystallization. In addition, by controlling the operational parameters, flower-like shaped ZnO nano-structures consisting of many hexagonal nano-rods with six facets were also obtained. The ZnO nano-structures showed a good optical property in photoluminescence analysis.

使用射频感应耦合热等离子体系统合成了氧化锌（ZnO）纳米颗粒和纳米结构。在高焓等离子体中合成的ZnO纳米粒子显示出高纯度和极小的晶体特性，其（30–50）nm尺寸分布适用于各个领域。ZnO纳米颗粒的最终形态受到工艺参数（例如腔室压力，冷却方法和反应器配置）的影响。因此，从重结晶的角度讨论了工艺条件的影响。此外，通过控制操作参数，还获得了由许多具有六个小平面的六角形纳米棒组成的花状ZnO纳米结构。ZnO纳米结构在光致发光分析中显示出良好的光学性质。