Abstract

The effect of a high-frequency discharge on the change in the topography of the surface of KU-1 optical quartz and transmission of visible light (400–1000 nm) is studied. The working gases of the discharge are D₂ and a D₂/N₂ mixture, in which the fraction of N₂ is 25 mol %. The addition of nitrogen increases the rate of sputtering from 60 to 300 nm/h without changing the stoichiometry of the surface layers. After the exposure in plasma, the root-mean-square roughness of the surface decreases from 1.3 to 0.6 nm. The transparence of quartz remains unchanged. The analysis of the roughness and calculation of the diffuse light scattering with a wavelength of 400 nm after passing through quartz are executed using the power spectral density functions.

中文翻译：

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暴露于氘和氘与氮的混合物中的高频放电后，石英玻璃表面和光透射的形貌

摘要

研究了高频放电对KU-1光学石英表面形貌变化和可见光（400-1000 nm）透射率的影响。放电的工作气体是D ₂和D ₂ / N ₂混合物，其中N ₂的分数为25摩尔％。氮的添加将溅射速率从60nm / h增加到300nm / h，而不改变表面层的化学计量。在等离子体中曝光后，表面的均方根粗糙度从1.3纳米降低到0.6纳米。石英的透明度保持不变。使用功率谱密度函数执行粗糙度分析和通过石英后波长为400 nm的散射光散射的计算。