Abstract

The possibilities of using medium-energy (hundreds of kiloelectronvolts) ion beams for diagnostics of solids by measuring the spectra of characteristic X-ray radiation are considered. A modification of the method is proposed that consists in using probing beams of neutral atoms. It is shown that the use of such beams makes it possible to eliminate the negative effect of the surface potential caused by the charge accumulation when working with dielectric samples.

中文翻译：

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使用中能原子束进行固态PIXE诊断

摘要

考虑了通过测量特征X射线辐射的光谱将中能（几百千伏）离子束用于固体诊断的可能性。提出了对该方法的修改，该修改包括使用中性原子的探测束。结果表明，使用这种光束可以消除在处理介电样品时由于电荷积累而引起的表面电势的负面影响。