In the context of growing interest in strain engineering, we present a theoretical protocol for the reconstruction of extrinsic and intrinsic strain tensors in single-crystals attached to a template, with an arbitrary oriented coordinate system. Input data for the protocol are extrinsic deformations of lattice planes, i.e., measured with reference to a template. By combining the protocol with elasticity theory, material property modification can be elucidated. Different methods for strain measurements can take advantage of this approach. It has been applied for reconstruction of strain tensor depth distribution in off-axis LiTaO₃ crystals implanted with H⁺ ions, which is the key step for piezoelectric thin film-on-insulator fabrication by the Smart Cut process. Modifications of composition, lattice parameters, and elastic constants are indicated and discussed.

中文翻译：

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离轴单晶中深度分辨应变张量的重建：在H +离子注入的LiTaO3中的应用

在对应变工程的兴趣日益增长的背景下，我们提出了一种理论协议，可用于以任意取向的坐标系重建附着在模板上的单晶中的外在和固有应变张量。协议的输入数据是晶格平面的外在变形，即参照模板进行的测量。通过将协议与弹性理论相结合，可以阐明材料属性的修改。应变测量的不同方法可以利用这种方法。它已被用于重建注入H ^+的离轴LiTaO ₃晶体中的应变张量深度分布。离子，这是通过Smart Cut工艺制造绝缘体上压电薄膜的关键步骤。指出并讨论了组成，晶格参数和弹性常数的修改。