当前位置: X-MOL 学术J. Infrared Millim. Terahertz Waves › 论文详情
Our official English website, www.x-mol.net, welcomes your feedback! (Note: you will need to create a separate account there.)
Sensitive Near-Field Slit Probe with High Spatial Resolution for Passive Millimeter-Wave Microscopy
Journal of Infrared Millimeter and Terahertz Waves ( IF 2.9 ) Pub Date : 2021-02-26 , DOI: 10.1007/s10762-021-00777-8
Manabu Ishino , Shun-ichi Nakamura , Tatsuo Nozokido

A novel type of near-field slit probe with high sensitivity and high spatial resolution is proposed. We tested the implementation of this in passive millimeter-wave microscopy at frequencies around 50 GHz. The slit probe comprises a standard rectangular waveguide incorporating a triple-screw tuner penetrating into the waveguide, followed by a four-section quarter-wave transformer, and a metal-coated silicon chip with a micro-slit aperture fabricated at the probe tip using a bulk micromachining technique. The probe allows the transmission of the thermal radiation collected at the probe aperture to the radiometric receiver used in passive millimeter-wave microscopy to be maximized, resulting in highly sensitive measurements. The system noise temperature of the radiometric receiver including the slit probe used in the passive measurements was found to be 1800 K, meaning that a temperature resolution of 0.18 K with the integration time set to 1 s was achieved. This system noise temperature is four times better than that when a tapered slit probe with no tuning circuit was used. Image acquisition with a spatial resolution of better than 100 μm was demonstrated over the temperature range from 210 to 310 K.



中文翻译:

具有高空间分辨率的灵敏近场狭缝探针,用于被动毫米波显微镜

提出了一种新型的高灵敏度,高空间分辨率的近场裂隙探针。我们在无源毫米波显微镜中以50 GHz左右的频率测试了此实现方式。狭缝探针包括一个标准的矩形波导,该波导包含一个三螺旋调谐器,该调谐器穿透到波导中,然后是一个四节的四分之一波长变换器,以及一个金属涂层的硅芯片,该芯片具有一个微缝隙孔,该缝隙使用探针在针尖处制造。批量微加工技术。该探头可以最大程度地将在探头孔处收集的热辐射传输至无源毫米波显微镜中使用的辐射测量接收器,从而实现高度灵敏的测量。辐射测量接收机的系统噪声温度(包括用于无源测量的狭缝探头)为1800 K,这意味着在积分时间设置为1 s的情况下可实现0.18 K的温度分辨率。该系统的噪声温度比使用不带调谐电路的锥形狭缝探针时的噪声温度高四倍。在210至310 K的温度范围内证明了空间分辨率优于100μm的图像采集。

更新日期:2021-02-26
down
wechat
bug