Optik ( IF 3.1 ) Pub Date : 2021-02-22 , DOI: 10.1016/j.ijleo.2021.166604 Chi Wang , Yongliang Li , Yashuai Yang , Zhiwen Chen , Yingming Zhang
The influence of phase difference in laser interference lithography system is often ignored by researchers. In this paper, we simulated the interference process of dual-beam, three-beam and four-beam, and the influence of phase difference on the interference effect was discussed in detail. The simulation results show that in the process of dual-beam and three-beam interference, the change of phase difference causes the shift of the interference pattern but does not change the laser intensity distribution of the interference field, and has no effect on the actual interference processing; while in the process of four-beam interference, the change of phase difference can change the laser intensity of the interference field. Based on this, we built a four-beam interference processing system with dual-channel mutual injection solid-state laser as the laser source to process aluminum materials. The phase of the beam is changed by adjusting the optical path of the output laser, and the interference processing effect is observed when there are different phase differences between the beams. The experimental results show that in the process of four-beam interference processing, when the phase difference between beams is not zero, the interference processing will be greatly affected, and the processing results will appear some phenomena, such as small depth of concave holes, irregular shape, unclear boundary between concave holes and so on.
中文翻译:
相位差对多光束干涉处理效果的影响
研究人员常常忽略了相位差对激光干涉光刻系统的影响。本文模拟了双光束,三光束和四光束的干涉过程,并详细讨论了相位差对干涉效应的影响。仿真结果表明,在双光束和三光束干涉过程中,相位差的变化会引起干涉图样的偏移,但不会改变干涉场的激光强度分布,对实际干涉没有影响。干扰处理;而在四光束干涉过程中,相位差的变化会改变干涉场的激光强度。基于此,我们构建了以双通道互注入固态激光器为加工铝材料的激光源的四光束干涉处理系统。通过调整输出激光的光路来改变光束的相位,并且当光束之间存在不同的相位差时,可以观察到干涉处理效果。实验结果表明,在四光束干涉加工过程中,当光束之间的相位差不为零时,干涉加工会受到很大影响,加工结果会出现一些现象,如凹孔深度小,形状不规则,凹孔之间的边界不清晰等。当光束之间存在不同的相位差时,可以观察到干涉处理效果。实验结果表明,在四光束干涉加工过程中,当光束之间的相位差不为零时,干涉加工会受到很大影响,加工结果会出现一些现象,如凹孔深度小,形状不规则,凹孔之间的边界不清晰等。当光束之间存在不同的相位差时,可以观察到干涉处理效果。实验结果表明,在四光束干涉加工过程中,当光束之间的相位差不为零时,干涉加工会受到很大影响,加工结果会出现一些现象,如凹孔深度小,形状不规则,凹孔之间的边界不清晰等。